JPH0467899B2 - - Google Patents

Info

Publication number
JPH0467899B2
JPH0467899B2 JP61131456A JP13145686A JPH0467899B2 JP H0467899 B2 JPH0467899 B2 JP H0467899B2 JP 61131456 A JP61131456 A JP 61131456A JP 13145686 A JP13145686 A JP 13145686A JP H0467899 B2 JPH0467899 B2 JP H0467899B2
Authority
JP
Japan
Prior art keywords
vibrating beam
type
vibrating
magnetic
natural frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61131456A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62288542A (ja
Inventor
Kyoichi Ikeda
Tetsuya Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP13145686A priority Critical patent/JPS62288542A/ja
Publication of JPS62288542A publication Critical patent/JPS62288542A/ja
Publication of JPH0467899B2 publication Critical patent/JPH0467899B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP13145686A 1986-06-06 1986-06-06 振動式半導体トランスジユ−サ Granted JPS62288542A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13145686A JPS62288542A (ja) 1986-06-06 1986-06-06 振動式半導体トランスジユ−サ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13145686A JPS62288542A (ja) 1986-06-06 1986-06-06 振動式半導体トランスジユ−サ

Publications (2)

Publication Number Publication Date
JPS62288542A JPS62288542A (ja) 1987-12-15
JPH0467899B2 true JPH0467899B2 (en]) 1992-10-29

Family

ID=15058381

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13145686A Granted JPS62288542A (ja) 1986-06-06 1986-06-06 振動式半導体トランスジユ−サ

Country Status (1)

Country Link
JP (1) JPS62288542A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2526987B2 (ja) * 1988-05-17 1996-08-21 横河電機株式会社 振動式トランスデュ―サ
JPH02269928A (ja) * 1989-04-12 1990-11-05 Yokogawa Electric Corp 真空計

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1588669A (en) * 1978-05-30 1981-04-29 Standard Telephones Cables Ltd Silicon transducer

Also Published As

Publication number Publication date
JPS62288542A (ja) 1987-12-15

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